SAITO Katsuaki | Hitachi Research Laboratory, Hitachi Ltd.
スポンサーリンク
概要
関連著者
-
Suzuki Kenji
Institute For Materials Research Laboratory Tohoku University
-
SAITO Katsuaki
Hitachi Research Laboratory, Hitachi Ltd.
-
OHUE Michio
Hitachi Research Laboratory, Hitachi Ltd.
-
Ohue Michio
Hitachi Research Laboratory Hitachi Ltd.
-
Suzuki K
横浜国大 大学院工学研究院
-
鈴木 和夫
横浜大
-
Fukuda Takuya
Hitachi Research Laboratory Hitachi Ltd.
-
Saito K
Department Of Materials Technology Chiba University
-
Suzuki K
Ntt Transmission Systems Lab. Ibaraki Jpn
-
FUKUDA Takuya
Semiconducter Development Center, Hitachi Ltd.
-
SHIMA Kenzou
Hitachi Works, Hitachi Ltd.
-
MOMMA Naohiro
Hitachi Research Laboratory, Hitachi Ltd.
-
Chiba Natsuyo
Research Laboratory For Advanced Technology Seiko Instruments Inc.
-
Shima Kenzou
Hitachi Works Hitachi Ltd.
-
Momma Naohiro
Hitachi Research Laboratory Hitachi Ltd.
-
SUZUKI Kazuo
Hitachi Works, Hitachi, Ltd.
-
CHIBA Natsuyo
Production Engineering Research Laboratory, Hitachi, Ltd.
-
Choi J
Hitachi Research Laboratory Hitachi Ltd.
-
CHOI Jai-Ho
Hitachi Research Laboratory, Hitachi Ltd.
-
Choi Jai-ho
Hitachi Research Laboratory Hitachi Ltd.
-
Suzuki Katsurmi
Tamachi Laboratory Superconductivity Research Laboratory Istec
著作論文
- High-Quality, High-Rate SiO_2 and SiN Films Formed by 400 kHz Bias Electron Cyclotron Resonance-Chemical Vapor Deposition
- Effects of Excited Species in Electron Cyclotron Resonance Plasma on SiN Film Resistivity
- Reactive Ion Etching of Sputtered PbZr_Ti_xO_3 Thin Films