Photoemission Profiles in Parallel-Plate RF Discharge in SF_6 Gas
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概要
- 論文の詳細を見る
A small amount of N_2 gas was added to SF_6 as a probe gas in SF_6 discharge. Spatiotemporal emission profiles at the N_2 337.1-nm line in 1 MHz discharge at pressures of around 0.3 Torr show a moving luminous peak from the negative glow region toward the electrode, whose polarity changes from negative to positive in each cycle of an applied voltage. The emission at the N_2^+ 391.4-nm line, on the other hand, does not show such a profile. The moving luminous peak is considered to reveal a contracting part of the cathode sheath.
- 社団法人応用物理学会の論文
- 1992-12-15
著者
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ISHIKAWA Itsuo
Faculty of Engineering, Yamanashi University
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SUGANOMATA Shinji
Faculty of Engineering, Yamanashi University
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Ishikawa Itsuo
Faculty Engineering Yamanashi University
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Suganomata Shinji
Faculty Of Engineering Yamanashi University
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Suganomata Shinji
Faculty Engineering Yamanashi University
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Amamiya Tatsuyuki
Faculty Of Engineering Yamanashi University
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