Nagaseki Kazuya | Tokyo Electron Yamanashi Ltd.

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概要

• 同名の論文著者
• Tokyo Electron Yamanashi Ltd.の論文著者

関連著者

• SAITO Yukinori

  Faculty of Engineering Yamanashi University

• Nagaseki Kazuya

  Tokyo Electron Yamanashi Ltd.

• ISHIKAWA Itsuo

  Faculty of Engineering, Yamanashi University

• SUGANOMATA Shinji

  Faculty of Engineering, Yamanashi University

• Ishikawa I

  Faculty Of Engineering Yamanashi University

• Saito Y

  Faculty Of Engineering Yamanashi University

• Sasaki Shinya

  Faculty Of Engineering Yamanashi University

• Ishikawa Itsuo

  Faculty Engineering Yamanashi University

• Suganomata Shinji

  Faculty Engineering Yamanashi University

• Suganomata S

  Yamanashi Univ. Kofu Jpn

• Suganomata Shinji

  Electrical Engineering Yananashi University

• Suganomata S

  Faculty Of Engineering Yamanashi University

• Nagaseki Kazuya

  Tokyo Electron Ltd., Nirasaki 407-01, Japan

• NAGASEKI Kazuya

  Faculty of Engineering Yamanashi University

• NISHIMURA Eiichi

  Tokyo Electron Yamanashi Ltd.

• Hirose Yuji

  Faculty Of Engineering Yamanashi University

• Hirose Yukio

  Department Of Materials Science And Engineering Kanazawa University

• Nishimura Eiichi

  Uyeki Primary School

• Hirose Y

  Department Of Materials Science And Engineering Kanazawa University

• Nishimura E

  Hitachi Ltd. Ibaraki Jpn

• 佐々木 聡

  東京工業大学 応用セラミックス研究所

• Hirose Yoichi

  Department Of Electronics School Of Engineering Tokai University

• Kobayashi Hidehiko

  Faculty Of Engineering Yamanashi University

• NISHIMURA Eiichi

  Development Engineering Group, Tokyo Electron Yamanashi Ltd.

• HIROSE Yuji

  Faculty of Engineering, Yamanashi University

• HIROSW Yuji

  Faculty of Engineering, Yamanashi University

• AOYAGI Kenji

  Faculty of Engineering, Yamanashi University

• HIROSE Yuuji

  Faculty of Engineering, Yamanashi University

• Kobayashi H

  Nagaoka Univ. Technol. Niigata Jpn

• Ishikawa Itsuo

  Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan

• Nagaseki Kazuya

  Tokyo Electron Yamanashi Ltd., Kitashimojo 2381-1, Fujii-machi, Nirasaki 407, Japan

• Suganomata Shinji

  Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan

• Sasaki Shinya

  Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan

• Saito Yukinori

  Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan

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著作論文

• Mass Spectrometry of Discharge Products at 13.56 MHz in SF_6 Gas ( Plasma Processing)
• Positive Ions in RF Discharge Plasmas of C_4F_8/Ar and C_4F_8/O_2 Mixtures
• Positive Ions in C_4F_8 RF Discharge in a Planar Diode
• Characteristics of Parallel-Plate RF Discharges in C_4F_8 Gas and C_4F_8/O_2 Mixtures
• Ionic Species in 13.56 MHz Discharges in CF_4 Gas and Mixtures of It with Ar and O_2
• Positive and Negative Ions in RF Plasmas of SF_6/N_2 and SF_6/Ar Mixtures in a Planar Diode
• Positive Ions in RF Discharge Plasma of CF_4 Gas in a Planar Diode
• Negative Ions in 13.56 MHz Discharge of SF_6 Gas in a Planar Diode
• Mass Spectrometrie Observation of Decomposition Products SF_x (x=1,2) in SF_6 Discharge at 13.56 MHz
• Ionic Species in 13.56 MHz Discharges in CF 4 Gas and Mixtures of It with Ar and O 2

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