NAGASEKI Kazuya | Faculty of Engineering Yamanashi University
スポンサーリンク
概要
関連著者
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ISHIKAWA Itsuo
Faculty of Engineering, Yamanashi University
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SUGANOMATA Shinji
Faculty of Engineering, Yamanashi University
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NAGASEKI Kazuya
Faculty of Engineering Yamanashi University
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SAITO Yukinori
Faculty of Engineering Yamanashi University
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Ishikawa I
Faculty Of Engineering Yamanashi University
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Ishikawa Itsuo
Faculty Engineering Yamanashi University
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Saito Y
Faculty Of Engineering Yamanashi University
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Sasaki Shinya
Faculty Of Engineering Yamanashi University
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Nagaseki Kazuya
Tokyo Electron Yamanashi Ltd.
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NISHIMURA Eiichi
Tokyo Electron Yamanashi Ltd.
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Suganomata S
Yamanashi Univ. Kofu Jpn
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Suganomata Shinji
Electrical Engineering Yananashi University
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Suganomata Shinji
Faculty Engineering Yamanashi University
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Nishimura Eiichi
Uyeki Primary School
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Nishimura E
Hitachi Ltd. Ibaraki Jpn
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Suganomata S
Faculty Of Engineering Yamanashi University
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Kobayashi Hidehiko
Faculty Of Engineering Yamanashi University
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NISHIMURA Eiichi
Development Engineering Group, Tokyo Electron Yamanashi Ltd.
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Kobayashi H
Nagaoka Univ. Technol. Niigata Jpn
著作論文
- Mass Spectrometry of Discharge Products at 13.56 MHz in SF_6 Gas ( Plasma Processing)
- Negative Ions in 13.56 MHz Discharge of SF_6 Gas in a Planar Diode
- Mass Spectrometrie Observation of Decomposition Products SF_x (x=1,2) in SF_6 Discharge at 13.56 MHz