Nagaseki Kazuya | Tokyo Electron Ltd., Nirasaki 407-01, Japan
スポンサーリンク
概要
関連著者
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SAITO Yukinori
Faculty of Engineering Yamanashi University
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Ishikawa Itsuo
Faculty Engineering Yamanashi University
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Suganomata Shinji
Faculty Engineering Yamanashi University
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Nagaseki Kazuya
Tokyo Electron Ltd., Nirasaki 407-01, Japan
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Sasaki Shinya
Faculty Of Engineering Yamanashi University
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Nagaseki Kazuya
Tokyo Electron Yamanashi Ltd.
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ISHIKAWA Itsuo
Faculty of Engineering, Yamanashi University
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SUGANOMATA Shinji
Faculty of Engineering, Yamanashi University
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Ishikawa I
Faculty Of Engineering Yamanashi University
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Saito Y
Faculty Of Engineering Yamanashi University
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Suganomata S
Yamanashi Univ. Kofu Jpn
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Suganomata Shinji
Electrical Engineering Yananashi University
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Suganomata S
Faculty Of Engineering Yamanashi University
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Hirose Yuji
Faculty Of Engineering Yamanashi University
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佐々木 聡
東京工業大学 応用セラミックス研究所
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Hirose Yoichi
Department Of Electronics School Of Engineering Tokai University
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HIROSE Yuji
Faculty of Engineering, Yamanashi University
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HIROSE Yuuji
Faculty of Engineering, Yamanashi University
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Hirose Yukio
Department Of Materials Science And Engineering Kanazawa University
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Hirose Y
Department Of Materials Science And Engineering Kanazawa University
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Aoyagi Kenji
Faculty Of Engineering Yamanashi University
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Ishikawa Itsuo
Faculty of Engineering, Yamanashi University, 4–3–11 Takeda, Kofu 400, Japan
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Ishikawa Itsuo
Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan
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Nagaseki Kazuya
Tokyo Electron Yamanashi Ltd., Kitashimojo 2381-1, Fujii-machi, Nirasaki 407, Japan
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Aoyagi Kenji
Faculty of Engineering, Yamanashi University, Kofu 400, Japan
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Suganomata Shinji
Faculty of Engineering, Yamanashi University, Kofu 400, Japan
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Suganomata Shinji
Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan
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Sasaki Shinya
Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan
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Hirose Yuji
Faculty of Engineering, Yamanashi University, 4–3–11 Takeda, Kofu 400, Japan
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Hirose Yuuji
Faculty of Engineering, Yamanashi University, Kofu 400, Japan
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Saito Yukinori
Faculty of Engineering, Yamanashi University, Kofu 400, Japan
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Saito Yukinori
Faculty of Engineering, Yamanashi University, 4–3–11 Takeda, Kofu 400, Japan
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Saito Yukinori
Faculty of Engineering, Yamanashi University, Takeda 4-3-11, Kofu 400, Japan
著作論文
- Positive Ions in RF Discharge Plasmas of C_4F_8/Ar and C_4F_8/O_2 Mixtures
- Positive and Negative Ions in RF Plasmas of SF_6/N_2 and SF_6/Ar Mixtures in a Planar Diode
- Positive Ions in RF Discharge Plasma of CF_4 Gas in a Planar Diode
- Ionic Species in 13.56 MHz Discharges in CF 4 Gas and Mixtures of It with Ar and O 2
- Characteristics of Parallel-Plate RF Discharges in C 4F 8 Gas and C 4F 8/O 2 Mixtures
- Positive Ions in C 4F 8 RF Discharge in a Planar Diode