Synthesis of Diamond Thin Films by Thermal CVD Using Organic Compounds

スポンサーリンク

概要

• 論文の詳細を見る

• Diamond thin films have been formed by thermal chemical vapor deposition (thermal CVD) using the organic compounds such as CH_3OH, C_2H_5OH, CH_3COCH_3 C_2H_5COCH_3, and (CH_3)_3N. The films are grown on the silicon substrates with high growth rate (8-10 μm/h) under the pressure ranging 1-800 Torr. This growth rate is ten or several ten times faster than the CVD method using hydrocarbons such as CH_4 and C_2H_2. The films have good crystallinity and high quality in the sense of electron diffraction and Raman spectrum. The Vicker's hardness of the film is about 10000 kg/mm^2 and the gravity of that is about 3.52 g/cm^3.

• 社団法人応用物理学会の論文
• 1986-06-20

著者

• Hirose Yoichi

  Department Of Electrical Engineering Nippon Institute Of Technology

• Hirose Yoichi

  Department Of Electrical Engineering And Electronics Nippon Institute Of Technology

• TERASAWA Yuki

  Department of Electrical Engineering, Nippon Institute of Technology

関連論文

• Polygonal Deformation of Toroidal Smectic-A Domains in Isotropic Phase Induced by Electric-Field Application
• Formation Mechanism of p-Type Surface Conductive Layer on Deposited Diamond Films
• Space Charge Limited Current in Semiconducting Diamomd Films
• Synthesis of Diamond Thin Films Having Semiconductive Properties : Surfaces, Interfaces and Films
• Etching of Nondiamond Carbon in Diamond Thin Films Synthesized by Hot-Filament Chemical Vapor Deposition with Ultraviolet Irradiation
• Effect of Oxidation due to Ultraviolet-Light Irradiation on Diamond Thin Films Synthesized by Hot-Filament Chemical Vapor Deposition
• The Effect of Ultraviolet Irradiation on Electroless Plating Process of Nickel
• The Effect of Ultraviolet Irradiation on Eleclro and Electroless Platings of Nickel
• Experimental Studies of the Occurrence of the Cardiac Irregularities (I) : PROCEEDINGS OF THE 25TH ANNUAL MEETlNG, JAPANESE CIRCULATION SOCIETY Part III
• Rapid Growth of Diamond Films by Arc Discharge Plasma CVD : Condensed Matter
• The Growth Mechanism of Diamond Crystals in Acetylene Flames
• Synthesis of Diamond Thin Films by Thermal CVD Using Organic Compounds
• CVD Diamond Crystals and Carbon Nano Fibers synthesized by Simple Method(ABSTRACTS OF PROCEEDINGS OF THE SCHOOL OF INFORMATION TECHNOLOGY AND ELECTRONICS SERIES J TOKAI UNIVERSITY -2003-2004-)
• Characterization of Boron-Doped Diamond Film
• Flame Structure and Diamond Growth Mechanism of Acetylene Torch

もっと見る 閉じる

スポンサーリンク