Growth of Single-Walled Carbon Nanotubes by Hot-Filament Assisted Chemical Vapor Deposition below 500 °C
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Single-walled carbon nanotubes (SWCNTs) were grown at low temperatures by chemical vapor deposition (CVD) using a carbon filament. The growth experiment was carried out in a mixture of ethanol vapor and Ar gas that contains 3% H2, using Co as a catalyst. SWCNTs were obtained after the growth at 425 °C for 30 min. The results were significantly dependent on the temperature of the filament. Moreover, when the catalyst in the reaction chamber was exposed to ethanol vapor up to the start of catalyst reduction, SWCNTs were synthesized at 400 °C and vertically grown at 450 °C. The thickness of the SWCNT film was 3.0 μm for the growth period of 30 min.
- Japan Society of Applied Physicsの論文
- 2009-04-25
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