Nagai Mikio | Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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概要
- 同名の論文著者
- Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univの論文著者
関連著者
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Nagai Mikio
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Hori Masaru
Department Of Quantum Engineering Nagoya University
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NAGAI Mikio
Department of Quantum Engineering, Nagoya University
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TAKAI Osamu
EcoTopia Science Institute, Nagoya University
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堀 勝
名古屋大学大学院工学研究科電子情報システム専攻
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Hori Masaru
Department Of Electrical Engineering And Computer Science School Of Engineering Nagoya University
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Hiramatsu Mineo
Nano Factory Department Of Electrical And Electronic Engineering Meijo University
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Takai Osamu
Ecotopia Science Institute Nagoya University
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Zaima Shigeaki
Center For Cooperative Research In Advanced Science & Technology Nagoya University
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YAMAKAWA Koji
Department of Quantum Engineering, Nagoya University
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GOTO Toshio
Department of Quantum Engineering, Nagoya University
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Matsushita Akio
Department Of Quantum Engineering Nagoya University
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OKAMOTO Hidekazu
Asahi Glass Co., Ltd.
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Goto Toshio
Department Of Electronics Faculty Of Engineering Nagoya University
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Hori Masaru
Nagoya Univ. Nagoya Jpn
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Hori Masaru
Department Of Quantum Engineering School Of Engineering Nagoya University
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Nagai Mikio
Nagoya Univ. Nagoya Jpn
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Nagai Mikio
Department Of Quantum Engineering School Of Engineering Nagoya University
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Goto Toshio
Department Of Electronic Mechanical Engineering Nagoya University
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Goto Toshio
Department Of Quantum Engineering School Of Engineering Nagoya University
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Sakai Akira
Department Of Agricultural Chemistry The University Of Tokyo
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GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
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Nagai Mikio
Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Nagai Mikio
Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Nagai Mikio
Department of Quantum Engineering, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan
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YAMAKAWA Koji
Department of Applied Materials Science, Osaka Prefecture University
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Hiramatsu Mineo
Nano Factory, Graduate School of Science and Technology, Meijo University, Tempaku-ku Nagoya 468-8502, Japan
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Zaima Shigeaki
Center of Cooperative Research in Advanced Science & Technology, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Matsushita Akio
Department of Quantum Engineering, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan
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Okamoto Hidekazu
Asahi Glass Co., Ltd., Yokohama 221-8755, Japan
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Hayashi Takayuki
Department of Chemistry Faculty of Literature and Science Yamaguchi University
著作論文
- High Performance of Silicon Oxide Selective Etching Using F_2 Gas and Graphite Instead of Perfluorinated Compound Gases
- Atmospheric Pressure Fluorocarbon-Particle Plasma Chemical Vapor Deposition for Hydrophobic Film Coating
- Temperature and Density of CF Radicals in 60 MHz Capacitively Coupled Fluorocarbon Gas Plasma
- Silicon Oxide Selective Etching Employing Dual Frequency Superimposed Magnetron Sputtering of Carbon Using F2/Ar Gases
- Growth of Carbon Nanotubes by Microwave-excited Non-Equilibrium Atmospheric-Pressure Plasma
- Low-$k$ SiOCH Film Etching Process and Its Diagnostics Employing Ar/C5F10O/N2 Plasma