KAWAKAMI Satoru | Tokyo Electron AT Ltd.
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概要
関連著者
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KAWAKAMI Satoru
Tokyo Electron AT Ltd.
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堀 勝
名古屋大学大学院工学研究科電子情報システム専攻
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ITO Masafumi
Department of Pathology, Japanese Red Cross Nagoya Daiichi Hospital
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Hori Masaru
Department Of Quantum Engineering Nagoya University
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伊藤 昌文
名城大学理工学部
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GOTO Toshio
Department of Quantum Engineering, Nagoya University
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OHTA Takayuki
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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ISHIDA Tetsuro
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Ishida Tetsuro
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Ishida Tetsuro
Department Of Electronic Engineering Faculty Of Engineering Yamanashi University
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Ito Masafumi
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi
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GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
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Ohta Takayuki
Department of Chemistry, Graduate School of Science, The University of Tokyo
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Goto T
Graduate School Of Pharmaceutical Sciences Tohoku University
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Goto Takaaki
Department Of Electric Engineering Tokyo University Of Agriculture And Technology
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Hori Masaru
School Of Engineering Nagoya University
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Ohta Takayuki
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Ohta Takayuki
Department Of Electronic Engineering Faculty Of Engineering Osaka University
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Goto Toshio
Department Of Electronics Faculty Of Engineering Nagoya University
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後藤 俊夫
Imram Tohoku University
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Goto Toshio
Department Of Electronic Mechanical Engineering Nagoya University
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Ohta Takayuki
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo University
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Ishida Tetsuro
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Kawakami Satoru
Tokyo Electron AT Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki 407-0192, Japan
著作論文
- Study on the Absolute Density and Translational Temperature of Si Atoms in Very High Frequency Capacitively Coupled SiH_4 Plasma with Ar, N_2, and H_2 Dilution Gases
- Effects of Ar Dilution and Exciting Frequency on Absolute Density and Translational Temperature of Si Atom in Very High Frequency-Capacitively Coupled SiH_4 Plasmas
- Study on the Absolute Density and Translational Temperature of Si Atoms in Very High Frequency Capacitively Coupled SiH4 Plasma with Ar, N2, and H2 Dilution Gases