Kawakami Satoru | Tokyo Electron AT Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki 407-0192, Japan

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概要

関連著者

KAWAKAMI Satoru
Tokyo Electron AT Ltd.
Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
Ishida Tetsuro
Department Of Electronic Engineering Faculty Of Engineering Yamanashi University
Ito Masafumi
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi
GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
Ishida Tetsuro
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Ohta Takayuki
Department of Chemistry, Graduate School of Science, The University of Tokyo
Kawakami Satoru
Tokyo Electron AT Ltd., 650 Mitsuzawa, Hosaka-cho, Nirasaki 407-0192, Japan

著作論文

Study on the Absolute Density and Translational Temperature of Si Atoms in Very High Frequency Capacitively Coupled SiH4 Plasma with Ar, N2, and H2 Dilution Gases

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