ISHII Nobuo | Central Research Laboratory, Tokyo Electron Ltd.
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概要
関連著者
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ISHII Nobuo
Central Research Laboratory, Tokyo Electron Ltd.
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堀 勝
名古屋大学大学院工学研究科電子情報システム専攻
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ITO Masafumi
Department of Pathology, Japanese Red Cross Nagoya Daiichi Hospital
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Hori Masaru
Department Of Quantum Engineering Nagoya University
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GOTO Toshio
Department of Quantum Engineering, Nagoya University
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Hori Masaru
Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ
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Ishii Nobuo
Corporate R&d Central Research Laboratory Tokyo Electron Ltd.
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Ito Masafumi
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi
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GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
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NAKAMURA Masayuki
Department of Medical Simulation Engineering, Research Center for Nano Medical Engineering, Institut
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Goto T
Graduate School Of Pharmaceutical Sciences Tohoku University
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Goto Takaaki
Department Of Electric Engineering Tokyo University Of Agriculture And Technology
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Hori Masaru
School Of Engineering Nagoya University
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Ishii N
Central Research Laboratory Tokyo Electron Ltd.
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Nakamura M
Research Institute For Electronic Science Hokkaido University
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Goto Toshio
Department Of Electronics Faculty Of Engineering Nagoya University
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後藤 俊夫
Imram Tohoku University
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Nakamura Masayuki
Department Of Chemistry Faculty And Graduate School Of Sciences Kyushu University
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Goto Toshio
Department Of Electronic Mechanical Engineering Nagoya University
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Nakamura Masayuki
Department Of Animal Science Faculty Of Agriculture Tohoku University
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伊藤 昌文
名城大学理工学部
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OHTA Takayuki
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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ISHIDA Tetsuro
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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KAWAKAMI Satoshi
Tokyo Electron Tohoku Ltd.
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Kawakami Satoshi
Tokyo Electron At Ltd.
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Ishida Tetsuro
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Ishida Tetsuro
Department Of Electronic Engineering Faculty Of Engineering Yamanashi University
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Kono Akihiro
Center for Cooperative Research in Advanced Science and Technology, Nagoya University
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Kono A
Nagoya Univ. Nagoya Jpn
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Kono Akihiro
Center For Cooperative Research In Advanced Science And Technology Nagoya University
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NAKAYAMA Hirotaka
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University
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Nakamura M
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Nakayama Hirotaka
Department Of Quantum Engineering Graduate School Of Engineering Nagoya University
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Ohta Takayuki
Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo University
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Ohta Takayuki
Department of Chemistry, Graduate School of Science, The University of Tokyo
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Ishii Nobuo
Central Research Laboratory, Tokyo Electron Ltd., 4-1-14 Miyahara, Yodogawa-ku, Osaka 532-0003, Japan
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Ohta Takayuki
Department of Quantum Engineering, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Kawakami Satoshi
Tokyo Electron Tohoku Ltd., 1-2-41 Machiya, Shiroyama-cho, Tsukui-gun, Kanagawa 220-0011, Japan
著作論文
- Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF_4 Plasmas
- Measurement of Spatial Distribution of SiF_4 and SiF_2 Densities in High Density SiF_4 Plasma Using Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
- Spatial Distribution Measurement of Absolute Densities of CF and CF_2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
- Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF4 Plasmas