Kono Akihiro | Center For Cooperative Research In Advanced Science And Technology Nagoya University
スポンサーリンク
概要
関連著者
-
Kono Akihiro
Center For Cooperative Research In Advanced Science And Technology Nagoya University
-
HIROSE Satoshi
Department of Chemistry and Biochemistry, Graduate School of Engineering, Kyushu University
-
GOTO Toshio
Department of Quantum Engineering, Nagoya University
-
Goto Takaaki
Department Of Electric Engineering Tokyo University Of Agriculture And Technology
-
Kono Akihiro
Center for Cooperative Research in Advanced Science and Technology, Nagoya University
-
Kono A
Nagoya Univ. Nagoya Jpn
-
Goto Toshio
Department Of Electronics Faculty Of Engineering Nagoya University
-
後藤 俊夫
Imram Tohoku University
-
Goto Toshio
Department Of Electronic Mechanical Engineering Nagoya University
-
GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
著作論文
- CW Laser-Induced Fluorescence Study of SiH_2+ SiH_4 Reaction : Dominance of Two-Body Reaction Channel in Low-Pressure Silane Plasma
- Translational Temperature Measurement for SiH_2 in RF Silane Plasma Using CW Laser Induced Fluorescence Spectroscopy
- Laser-Induced-Fluorescence Study of SiH2 in a RF SiH4/SiH2Cl2 Plasma (レ-ザ-および放射光の半導体プロセス分野への応用特集号)
- Spatial Distribution Measurement of Absolute Densities of CF and CF_2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
- Production of CW High-Density Non Equilibrium Plasma in the Atmosphere Using Microgap Discharge Excited by Microwave
- Photodetachment Study of Capacitively-Coupled RF C_4F_8 Plasma
- Translational Temperature Measurement for SiH2 in RF Silane Plasma Using CW Laser Induced Fluorescence Spectroscopy