Production of CW High-Density Non Equilibrium Plasma in the Atmosphere Using Microgap Discharge Excited by Microwave
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概要
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A new technique for cw production of high-pressure, high-density, non-equilibrium plasma is presented. Using microwave excitation at 2.45 GHz, a stable atmospheric glow discharge was sustained between two knife-edge electrodes, having a length of 10 mm and facing each other across a 〜 100 μm microgap. Laser Thomson scattering diagnostics indicates that the plasma density in the microgap is as high as 1.6 × 10^<15> cm^<-3> at a microwave power of 100 W. The optical emission of the N_2 second positive band indicates that the gas temperature in the microgap is 1800 K, much lower than the electron temperature.
- 2001-03-15
著者
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Sugiyama Tomohiko
Graduate School Of Engineering Nagoya University
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Kono Akihiro
Center For Cooperative Research In Advanced Science And Technology Nagoya University
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Uchida Yoshiyuki
Aichi Institue Of Technology
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GOTO Toshio
Graduate School of Engineering, Nagoya University
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Sugiyama Tadashi
Department Of Physics Rikkyo University:(present Address) Depart Of Dental Radiology Tokyo Dental Co
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FURUHASH Hideo
Aichi Institute of Technology
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Goto Toshio
Graduate School Of Engineering Nagoya University
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Kono Akihito
Center for Cooperative Research in Advanced Science and Technology, Nagoya University
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