Electrical Characteristics of Ultra-Fine Trench Isolation Fabricated by a New Two-Step Filling Process

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-12-15

著者

• Tokuda Y

  Mitsubishi Electric Corp. Hyogo Jpn

• Tokuda Yasunori

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Tokuda Yasunori

  Central Research Laboratory Mitsubishi Electric Corporation

• Abe Yuji

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• SHIOZAWA Katsuomi

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• OISHI Toshiyuki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Murakami Taka-aki

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Tokuda Yasunori

  Advanced R&d Technology Center Mitsubishi Electric Corporation

• MAEDA Hiroshi

  ULSI Laboratory, Mitsubishi Electric Corporation

• YASUMURA Kenji

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Yasumura Kenji

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Abe Yuji

  Advanced R&d Technology Center Mitsubishi Electric Corporation

• ABE Yuji

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• SHIOZAWA Katsuomi

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• SHIOZAWA Katsuomi

  Advanced Technology R & D Center, Mitsubishi Electric Corporation

• OISHI Toshiyuki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• OISHI Toshiyuki

  Advanced Technology R & D Center, Mitsubishi Electric Corporation

• YASUMURA Kenji

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• MURAKAMI Taka-aki

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

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