615 非共振型超音波モータを用いた精密ステージの高速モーション制御

概要

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This paper proposes a robust digital controller for a high precision stage using a synchronous piezoelectric device driver to attain both high speed and high accuracy. The proposed controller consists of three elements: a friction compensator, a robust feedback controller, and a continuous path tracking system. The friction compensator based on the well-known static model compensates for the nonlinear characteristic of friction. Stability of the high precision stage is provided by the robust feedback controller based on the doubly coprime factorization and the disturbance observer. The tracking performance is further increased by the continuous path tracking system. The effectiveness of the proposed controller is evaluated through experimental results of SPIDER (synchronous piezoelectric device driver) system with an additional load of 20kg.
社団法人日本機械学会の論文
2005-08-22