スティックスリップ補償と連続軌跡追従制御に基づく超音波アクチュエータ駆動精密ステージの一制御法

概要

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This paper presents a friction model-based control of an ultra-precision stage that is equipped with the non-resonant ultrasonic actuator (SPIDER). The SPIDER is expected as an actuator suitable for stages for semiconductor manufacturing with the electron beam which is light source in next generation.At first, the friction characteristics as a function of stage position are experimentally identified. Next, measuring the time variation of the static friction characteristics, the on-line identification method for the control system is proposed. And then, a friction model-based compensation for the PI control system is discussed. In addition to the PI control system, the continuous-path tracking control system with the compensation is designed. Finally, the model-based control method is verified through the positioning experiments.
2005-06-01