Carbon Incorporation on ($1\bar{1}01$) Facet of AlGaN in Metal Organic Vapor Phase Epitaxy

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概要

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• Using C2H2 as the source material, the incorporation of carbon into a ($1\bar{1}01$)AlGaN facet was studied in metal organic vapor phase epitaxy. The cathodo luminescence (CL) spectra for the sample surface were dominated by two near-band-edge emission peaks, assigned as a donor bound exciton (DBE) peak and a carbon-related exciton peak. The emission intensity of the carbon related exciton peak was enhanced by carbon doping, and the enhancement was more efficient on the ($1\bar{1}01$) facets than on the (0001) facet. It was found that more carbon is incorporated in a sample with high Al composition on the ($1\bar{1}01$) facets. In the case of Mg doping, on the other hand, the optical properties on the ($1\bar{1}01$) facets are nearly the same as those of the (0001) facet.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-10-15

著者

• Sawaki Nobuhiko

  Department Of Electronics Faculty Of Engineering Nagoya University

• Yamaguchi Masahito

  Department Of Electronic Engineering Faculty Of Engineering Osaka University

• Koide Norikatsu

  Department of Electronics and Akasaki Research Center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

• HONDA Yoshio

  Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University

• Honda Yoshio

  Department of Electronics and Akasaki Research Center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

• Hikosaka Toshiki

  Department of Electronics and Akasaki Research Center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

• Sawaki Nobuhiko

  Department of Electronics and Akasaki Research Center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

• Sawaki Nobuhiko

  Department of Electrical and Electronic Engineering, Aichi Institute of Technology, Toyota, Aichi 470-0392, Japan

• YAMAGUCHI Masahito

  Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University

• Yamaguchi Masahito

  Department of Electronics and Akasaki Research Center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

• Honda Yoshio

  Department of Chemistry, Faculty of Science, Kanazawa University

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