Growth of GaN on Metallic Compound Graphite Substrate Using Hydride Vapor Phase Epitaxy
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概要
- 論文の詳細を見る
In this paper, the GaN poly crystal was grown by hydride vapor phase epitaxy at 1090 °C on the metallic compound graphite substrate with good heat dissipation. The coefficient of thermal expansion of the metallic compound graphite substrate is 6.2 μm/(m\cdotK). The heat conductivity is 150 W/(m\cdotK), and specific gravity is 3.1. The metallic compound graphite substrate was gained higher thermal conductivity more than the sapphire substrate through by injecting the nonferrous metal in the porosity carbon graphite base. The GaN poly crystal grown along the [0001] c-axis by hydride vapor phase epitaxy was observed on the metallic compound graphite substrate through the scanning electron microscope and energy dispersive spectroscopy. And electrical characteristic of substrate with each different condition was investigated by Hall Effect measurement.
- The Japan Society of Applied Physicsの論文
- 2013-11-25
著者
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Ahn Hyung
Department Of Applied Physics Korea Maritime University
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YI Sam
Department of Applied Physics, Korea Maritime University
-
Park Min
Department Of Biological Science Graduate School Of Science The University Of Tokyo
-
Lee Gang
Department of Applied Sciences, Korea Maritime University, Busan 606-791, Korea
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Jung Se-Gyo
Department of Applied Sciences, Korea Maritime University, Busan 606-791, Korea
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Kim Suck-Whan
Department of Physics, Andong National University, Andong, Gyeongbuk 760-749, Korea
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YANG Min
Department of Agricultural Chemistry, Division of Applied Life Science, Gyeongsang National University
-
Kim Ji
Department of Advanced Materials Engineering, Sangju National University, Kyeongbuk 742-711, Korea
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Shin Min
Department of Applied Science, Korea Maritime University, Busan 606-791, Korea
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Jeon Hun
Department of Applied Science, Korea Maritime University, Busan 606-791, Korea
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Shin Min
Department of Applied Sciences, Korea Maritime University, Busan 606-791, Korea
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Yi Sam
Department of Applied Sciences, Korea Maritime University, Busan 606-791, Korea
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Sawaki Nobuhiko
Department of Electrical and Electronic Engineering, Aichi Institute of Technology, Toyota, Aichi 470-0392, Japan
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Sawaki Nobuhiko
Department of Electrical and Electronics Engineering, Aichi Institute of Technology, Toyota, Aichi 470-0392, Japan
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Yu Young
LED-MCT R&BD Center at Pukyong National University, Busan 608-737, Korea
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Lee Hyo
L&L Co., Ltd., Suwon, Gyeonggi 443-470, Korea
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Kang Hee
CSsol Co., Ltd., Busan 619-961, Korea
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Park Min
Department of Applied Sciences, Korea Maritime University, Busan 606-791, Korea
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