Buried Tungsten Metal Structure Fabricated by Epitaxial-Lateral-Overgrown GaN via Low-Pressure Metalorganic Vapor Phase Epitaxy

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-05-15

著者

• Miyake Hideto

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Mie University

• Hiramatsu Kazumasa

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Mie University

• KAWAGUCHI Yasutoshi

  Department of Electronics, School of Engineering, Nagoya University, Chikusa-ku, Nagoya

• SAWAKI Nobuhiko

  Department of Electronics, School of Engineering, Nagoya University, Chikusa-ku, Nagoya

• IYECHIKA Yasushi

  Tsukuba Research Laboratory, Sumitomo Chemical Co., Ltd.

• MAEDA Takayoshi

  Tsukuba Research Laboratory, Sumitomo Chemical Co., Ltd.

• Yamaguchi M

  Toyota Technological Inst. Nagoya Jpn

• Sawaki N

  Nagoya Univ. Nagoya Jpn

• Miyake Hideto

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Mie University

• Maeda T

  Tsukuba Research Laboratory Sumitomochemical Co. Ltd.

• Sawaki Nobuhiko

  Department Of Electronics Faculty Of Engineering Nagoya University

• Hiramatsu Kazumasa

  Division Of Electrical And Electronic Engineering Graduate School Of Engineering Mie University

• Hiramatsu Kazumasa

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Mie University

• Hiramatsu K

  Ntt Corp. Tsukuba‐shi Jpn

• MOTOGAITO Atsushi

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Mie University

• YAMAGUCHI Motoo

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Mie University

• Motogaito Atsushi

  Division Of Electrical And Electronic Engineering Graduate School Of Engineering Mie University

• HAINO Masahiro

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Mie University

• Haino Masahiro

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Mie University

• Iyechika Yasushi

  Tsukuba Research Laboratory Sumitomochemical Co. Ltd.

• Sawaki Nobuhiko

  Department of Electrical and Electronic Engineering, Aichi Institute of Technology, Toyota, Aichi 470-0392, Japan

• SAWAKI Nobuhiko

  Department of Electronics, Nagoya University

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