Plasma-Process-Induced Damage in Sputtered TiN Metal-Gate Capacitors with Ultrathin Nitrided Oxides

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-08-15

著者

• Huang T‐y

  National Chiao Tung Univ. Hsinchu Twn

• Chao T

  National Chiao Tung Univ. Hsinchu Twn

• Chien C‐h

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Liang M‐s

  Taiwan Semiconductor Manufacturing Co. Hsinchu Twn

• Chang Chun-yen

  Institute Of Electronics National Chiao Tung University

• Chang Chun-yen

  Instiute Of Electronics National Chiao-tang University

• Chang Chun-yen

  Department Of The Electro-optical Engineering National Chiao Tung University

• HUANG Tiao-Yuan

  Institute of Electronics, National Chiao Tung University

• HUANG Tiao-Yuan

  National Nano Device Laboratory

• Huang T-y

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• CHEN Chi-Chun

  Institute of Elecrtonics, National Chiao Tung University

• LIN Homg-Chih

  National Nano Device Laboratories

• CHAO Tien-Sheng

  National Nano Device Laboratories

• LIANG Mong-Song

  Taiwan Semiconductor Manufacturing Co., Ltd.

• Huang Tiao-yuan

  Institute Of Electronics National Chiao Tung University:national Nano Device Laboratories

• Huang Tiao-yuan

  Institute Of Electronics National Chiao Tung University

• Chao T‐s

  Department Of Electrophysics National Chiao Tung University

• Chao Tien

  National Device Laboratory

• Lin H‐c

  National Nano Device Laboratories

• Lin Horng-chih

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Lin Horng-chih

  Institute Of Electronics National Chiao Tung University

• Liang Mong-song

  R&d Department Taiwan Semiconductor Manufacturing Company

• Liang Mong-song

  Taiwan Semiconductor Manufacturing Co. Ltd.

• Chang Chun-yen

  Institute Of Electronics National Chiao Tang University:national Nano-device Laboratories

• Lin Horng-chih

  National Chiao Tung University

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