Suppression of Boron Pemetration in PMOS by Using Oxide Gettering Effect in Poly-Si Gate

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-02-28

著者

• LEE Chung

  Department of Anesthesiology and Pain Medicine, Asan Medical Center, University of Ulsan College of

• Chao T

  National Chiao Tung Univ. Hsinchu Twn

• Lei T

  National Chiao Tung Univ. Hsinchu Twn

• LEI Tan

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• CHAO Tien

  National Nano Device Laboratories

• Chao T‐s

  Department Of Electrophysics National Chiao Tung University

• Chao Tien

  National Device Laboratory

• Lee Chung

  Department Of Electronics Engineering National Chiao Tung University

• Lei Tan

  Department Of Electronic Engineering National Chiao Tung University

• Lee C

  Department Of Electronics Engineering National Chiao Tung University

• Lei Tan.

  National Nano Device Laboratory:department Of Electronics Engineering And Institute Of Electronics N

• Lin Yug

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung Univergity

• Lin Y

  National Taiwan Univ. Taipei Twn

• Lee Chung

  Department Of Anesthesiology And Pain Medicine Asan Medical Center University Of Ulsan College Of Me

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