Suppression of Boron Penetration in BF^+_2-Implanted Poly-Si Gate

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-12-15

著者

• LEE Chung

  Department of Anesthesiology and Pain Medicine, Asan Medical Center, University of Ulsan College of

• Wang Chuan

  Departments Of Clinical Neurology And Stroke Medicine Yokohama City University Graduate School Of Me

• CHAO Tien

  National Nano Device Laboratories

• Chao Tien

  National Device Laboratory

• Wang Chuan

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Lei Tan.

  National Nano Device Laboratory:department Of Electronics Engineering And Institute Of Electronics N

• CHU Chih-Hsun

  National Nano Device Laboratory

• HO Kuai

  Department of Chemistry, National Tsing Hua University

• Ho Kuai

  Department Of Chemistry National Tsing Hua University

• Lee Chung

  Department Of Anesthesiology And Pain Medicine Asan Medical Center University Of Ulsan College Of Me

• LEE Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

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