Combination of Chemical Mechanical Polishing and Ultrahigh Vacuum Chemical Vapor Deposition Techniques to Fabricate Polycrystalline Thin Film Transistors

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概要

• 論文の詳細を見る
• 1995-08-21

著者

• CHANG Chun-Yen

  Department of Electronics Engineering, National Chiao Tung University

• Dai Bau-tong

  National Nano Device Laboratories

• Dai Bau-tong

  National Nano Device Lab.

• Dai Bau-tong

  National Nano Device Laboratory

• CHEN Liang-Po

  National Nano Device Laboratory

• Lei T

  National Chiao Tung Univ. Hsinchu Twn

• LEI Tan

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Chang Chun-yen

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Chang Chun-yen

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung Uiversity

• LIN Hsiao-Yi

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• CHENG Juing-Yi

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• HWU Jyh-Chang

  Department of Electronics Engineering & Institute of Electronics, National Chiao Tung University

• Lei Tan

  Department Of Electronic Engineering National Chiao Tung University

• Chen Liang-po

  National Nano Device Laboratories

• Lin Hsiao-yi

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung University

• Hwu Jyh-chang

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung University

• Chang Chun-yen

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung University

• Lei Tan

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung University

• Cheng Juing-yi

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung University

• Lin Hsiao-Yi

  Department of Electronics Engineering & Institute of Electronics, National Chiao Tung University

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