Antenna Charging Effects on the Electrical Characteristics of Polysilicon Gate during Electron Cyclotron Resonance Etching

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概要

• 論文の詳細を見る
• 1996-02-01

著者

• Chen H‐c

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng H‐c

  National Tsing Hua Univ. Hsinchu Twn

• CHENG Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Dai B‐t

  National Nano Device Lab. Hsinchu Twn

• Dai Bau-tong

  National Nano Device Laboratories

• Dai Bau-tong

  National Nano Device Lab.

• KANG Tzong-Kuei

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• UENG Shih-Yuan

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• CHEN Liang-Po

  National Nano Device Laboratory

• CHEN Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Chen L‐p

  National Nano Device Laboratories

• Chen Liang-po

  National Nano Device Laboratories

• Kang Tzong-kuei

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Ueng Shih-yuan

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng Huang-chung

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University

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