A New Portrayal of Oxidation of Undoped Polycrystalline Silicon Films in a Short Duration

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-01-30

著者

• Chen H‐c

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng H‐c

  National Tsing Hua Univ. Hsinchu Twn

• Cheng Huang‐chung

  Nano Electronics And Display Technology Lab. Department Of Electronics Engineering And Institute Of

• CHENG Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• FENG Ming-Shiann

  Institute of Materials Science and Engineering, National Chiao Tang Universit

• WANG Ping-Wei

  Department of Electronics Engineering and Institute of Electronics, Semiconductor Research Center, N

• SU Huan-Ping

  Department of Electronics Engineering and Institute of Electronics, Semiconductor Research Center, N

• HONG Gary

  United Microelectronics Corporation (UMC)

• Tsai Meng-Jin

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Hong Garry

  Central Integration Division, United Microelectronics Corporation

• Wang Ping-wei

  Department Of Electronics Engineering And Institute Of Electronics Semiconductor Research Center Nat

• Su H‐p

  Department Of Electronics Engineering And Institute Of Electronics Semiconductor Research Center Nat

• Su Huan-ping

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University

• Tsai M‐j

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Tsai Meng-jin

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Hong G

  Rodel‐nitta Co. Nara Jpn

• Cheng Huang-chung

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University

• Feng M‐s

  Institute Of Materials Science And Engineering National Cliiao Tang University

• Hong Gary

  Specialty Techology Division United Microelectronics Corporation

• Feng Ming-shiann

  Institude Of Materials Science And Engineering National Chiao Tung University

• Hong Gary

  United Microelectronics Cooperation, Hsin-Chu, Taiwan, ROC

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