High-Performance Superthin Oxide/Nitride/Oxide Stacked Dielectrics Formed by Low-Pressure Oxidation of Ultrathin Nitride

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-04-15

著者

• Liu H‐w

  Nanya Technol. Corp. Taoyuan Twn

• CHENG Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Liu Han-wen

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• SU Huan-Ping

  Department of Electronics Engineering and Institute of Electronics, Semiconductor Research Center, N

• Su Huan-ping

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University

• Su Huan-ping

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng Huang-chung

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University

• Su Huan-Ping

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Liu Han-Wen

  Department of Electrical Engineering and Graduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 402, Taiwan, R.O.C.

• Liu Han-Wen

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

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