Microcrystalline SiC Films Grown by Electron Cyclotron Resonance Chemical Vapor Deposition at Low Temperatures

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概要

• 論文の詳細を見る
• 1995-10-15

著者

• Cheng Kuan-Lun

  Department of Electronics Engineering, National Chiao-Tung University

• Yew Tri-Rung

  Materials Science Center, National Tsing-Hua University

• Yew Tri-rung

  Materials Science Center National Tsing-hua University Hsinchu

• Cheng K‐l

  Department Of Electronics Engineering And Institute Of Electronics National Chiao-tung University

• CHENG Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• LIU Chih-Chien

  Department of Chemical Engineering, National Taiwan Institute of Technology

• LEE Chiapyng

  Department of Chemical Engineering, National Taiwan Institute of Technology

• Cheng H‐c

  National Chiao Tung Univ. Hsinchu Twn

• Liu C‐c

  National Cheng‐kung Univ. Tainan Twn

• Yew Tri-rung

  Materials Science Center National Tsing-hua University

• Cheng Kuan-lun

  Department Of Electronics Engineering And Institute Of Electronics National Chiao-tung University

• Lee Chiapyng

  Department Of Chemical Engineering National Taiwan Institute Of Technology

• Cheng Huang-chung

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University

関連論文

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