Microcrystalline SiC Films Grown by Electron Cyclotron Resonance Chemical Vapor Deposition at Low Temperatures
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概要
- 論文の詳細を見る
- 1995-10-15
著者
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Cheng Kuan-Lun
Department of Electronics Engineering, National Chiao-Tung University
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Yew Tri-Rung
Materials Science Center, National Tsing-Hua University
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Yew Tri-rung
Materials Science Center National Tsing-hua University Hsinchu
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Cheng K‐l
Department Of Electronics Engineering And Institute Of Electronics National Chiao-tung University
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CHENG Huang-Chung
Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University
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LIU Chih-Chien
Department of Chemical Engineering, National Taiwan Institute of Technology
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LEE Chiapyng
Department of Chemical Engineering, National Taiwan Institute of Technology
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Cheng H‐c
National Chiao Tung Univ. Hsinchu Twn
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Liu C‐c
National Cheng‐kung Univ. Tainan Twn
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Yew Tri-rung
Materials Science Center National Tsing-hua University
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Cheng Kuan-lun
Department Of Electronics Engineering And Institute Of Electronics National Chiao-tung University
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Lee Chiapyng
Department Of Chemical Engineering National Taiwan Institute Of Technology
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Cheng Huang-chung
Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University
関連論文
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