Low-Temperature Process to Improve the Leakage Current of (Ba, Sr)TiO_3 Films on Pt/TiN/Ti/Si Substrates

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-12-15

著者

• Huang S

  Mosel Vitelic Inc. Hsinchu Twn

• CHENG Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• CHEN Jyh-Shin

  Precision Instrument Development Center

• Chen Jyh-shin

  Precision Instrument Development Center (pidc) National Science Council (nsc)

• Lai Ming-jiunn

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng Huang-chung

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng Huang-chung

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University

• HWANG Chuan-Chou

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• JAING Cheng-Chung

  Precision Instrument Development Center (PIDC), National Science Council (NSC)

• HUANG Stewart

  Mosel Vitelic Incorporation

• JUANG Miin-Horng

  Department of Electronics Engineering, National Taiwan University of Science and Technology

• Jaing Cheng-chung

  Precision Instrument Development Center (pidc) National Science Council (nsc)

• Jaing Cheng-chung

  Precision Instrument Development Center (pidc)

• Juang Miin-horng

  Department Of Electronics Engineering National Taiwan University Of Science And Technology

• Juang Miin-horng

  Department Of Electrical Engineering National Taiwan University Of Science And Technology

• Hwang Chuan-chou

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

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