Passivation of GaAs Power Field-Effect Transistor Using Electron Cyclotron Resonance Chemical Vapor Deposition Silicon Nitride Technique
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-12-01
著者
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Wang Sheng-ping
Hexawave Inc Hsinchu Science-based Industrial Park
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Wang Sheng-ping
Hexawave Photonic Systems Inc. Hsinchu Science-based Industrial Park
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CHANG Edward
Institute of Material Science and Engineering, National Chiao Tung University
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LIN Kun-Chun
Institute of Electronics, National Chiao Tung University
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WU Janne-Wha
nstitute of Electronics, National Chiao Tung University
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CHEN Tzu-Hung
Hexawave Photonic Systems, Inc., Hsinchu Science-based Industrial Park
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CHEN John-Sea
Hexawave Photonic Systems, Inc., Hsinchu Science-based Industrial Park
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CHEN Jyh-Shin
Precision Instrument Development Center
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Chen Tzu-hung
Hexawave Photonic Systems Inc. Hsinchu Science-based Industrial Park
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Wu Janne-wha
Nstitute Of Electronics National Chiao Tung University
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Lin Kun-chun
Institute Of Electronics National Chiao Tung University
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Chen J‐s
National Sci. Council(nsc) Hsinchu Twn
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Chang Edward
Institute Of Material Science And Engineering National Chiao Tung University
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- Passivation of GaAs Power Field-Effect Transistor Using Electron Cyclotron Resonance Chemical Vapor Deposition Silicon Nitride Technique
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