Effects of Post-Oxygen Plasma Treatment on Pt/(Ba,Sr)TiO_3/Pt Capacitors at Low Substrate Temperatures

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2003-02-15

著者

• CHENG Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• SHYE Der-Chi

  Department of Electronics Engineering, Mingchi University of Technology

• CHEN Jyh-Shin

  Precision Instrument Development Center

• CHIOU Bi-Shiou

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Lai Ming-jiunn

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• HWANG Chuan-Chou

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• JAING Cheng-Chung

  Precision Instrument Development Center (PIDC), National Science Council (NSC)

• HUANG Stewart

  Mosel Vitelic Incorporation

• JUANG Miin-Horng

  Department of Electronics Engineering, National Taiwan University of Science and Technology

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