High-Performance Excimer-Laser-Crystallized Polycrystalline Silicon Thin-Film Transistors with the Pre-Patterned Recessed Channel

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概要

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• High-performance polycrystalline silicon (poly-Si) thin-film transistors (TFTs) have been achieved using an excimer laser crystallization method on a prepatterned recessed channel (RC). Such a prepatterned RC TFT exhibited an excellent field-effect mobility of 412 cm2 V-1 s-1 and an on/off current ratio higher than 1.1\times 10^{8} as compared with 125 cm2 V-1 s-1 and 2.2\times 10^{7} for the conventional ones, respectively. This is attributed to the two-dimensional control of the grain boundary location and the resultant cross-shaped grain boundary structures within the recessed regions. Therefore, the prepatterned RC TFTs with only one grain boundary parallel to the channel direction as the TFTs could be fabricated to avoid the perpendicular grain boundary. This technology is thus promising for the future applications of poly-Si TFTs in the system-on-panel (SOP) and three-dimensional integrated circuits (3D-ICs).

• 2012-06-25

著者

• Lee I-che

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng Huang-chung

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University

• Cheng Yu-ting

  Department Of Electrical Engineering And Computer Science University Of Michigan

• Wu Chun-Yu

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Wang Chao-Lung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Yang Po-Yu

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Cheng Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Cheng Yu-Ting

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Lee I-Che

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

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