Fabrication of Silicon and Germanium Nanostructures by Combination of Hydrogen Plasma Dry Etching and VLS Mechanism

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-07-30

著者

• Chen Hsuen-li

  Department Of Materials Science And Engineering National Taiwan University

• Chen H‐c

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng H‐c

  National Tsing Hua Univ. Hsinchu Twn

• CHU Tieh-Chi

  Department of Nuclear Science, National Tsing Hua University

• Chu Tien-chi

  Yuanpei Institute Of Science And Technology

• Ko Tsung-shine

  National Nano Device Laboratry

• YANG Ming-Che

  National Nano Device Laboratories

• SHIEH Jiann

  National Nano Device Laboratories

• KO Tsung-Shine

  Department of Atomic Science, National Tsing Hua University

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