Effect of Controlled Growth Dynamics on the Microstructure of Nonpolar $a$-Plane GaN Revealed by X-ray Diffraction

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概要

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• This paper reports the effect of controlled growth dynamics, as monitored by in situ optical reflectance, on the microstructure of nonpolar $a$-plane GaN films grown on $r$-plane sapphire. The mosaic microstructure of $a$-plane GaN and its anisotropy are evaluated by X-ray rocking curve (XRC) measurements. By inserting a pronounced islanding stage followed by an enhanced lateral growth, pit-free $a$-plane GaN has been achieved showing an XRC linewidth of ${\sim}0.18$ and ${\sim}0.3$° for on- and off-axes planes, respectively, with only minor anisotropy. The density of basal-plane stacking faults is reduced by ${\sim}70$% as determined by a modified Williamson–Hall X-ray analysis.

• 2009-07-25

著者

• Kuo Hao-chung

  Department Of Photonic And Institute Of Electro-optical Engineering National Chiao Tung University

• Lu Tien-chang

  Department Of Photonics And Institute Of Electro-optical Engineering National Chiao Tung University

• Wang Shing-chung

  Department Of Photonic And Institute Of Electro-optical Engineering National Chiao Tung University

• KO Tsung-Shine

  Department of Atomic Science, National Tsing Hua University

• Zhang Yu

  Department Of Chemistry And Pharmacy Jiamusi University

• Han Jung

  Department Of Electrical Engineering Yale University

• Wang Shing-Chung

  Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 30050, Taiwan

• Sun Qian

  Department of Electrical Engineering, Yale University, New Haven, CT 06520, U.S.A.

• Yerino Christopher

  Department of Electrical Engineering, Yale University, New Haven, CT 06520, U.S.A.

• Lee In-Hwan

  Department of Electrical Engineering, Yale University, New Haven, CT 06520, U.S.A.

• SUN Qian

  Department of Chemistry, The Ohio State University

• Zhang Yu

  Department of Electrical Engineering, Yale University, New Haven, CT 06520, U.S.A.

• Kuo Hao-Chung

  Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 30050, Taiwan

• Ko Tsung-Shine

  Department of Electrical Engineering, Yale University, New Haven, CT 06520, U.S.A.

• Lu Tien-Chang

  Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 30050, Taiwan

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