Metal Organic Chemical Vapor Deposition Growth of GaN-Based Light Emitting Diodes With Naturally Formed Nano Pyramids

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概要

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• GaN-based light-emitting diodes (LEDs) with naturally formed nano pyramids roughened surfaces grown by metal organic chemical vapor deposition (MOCVD) were demonstrated. In this study, Mg-treatment, a growth-interruption step and a surface treatment using biscyclopentadienyl magnesium (CP2Mg), was performed to form the nano pyramids on the surface of a p-type cladding layer, and then a p-type contact layer was grown on the p-type cladding layer, so as to create a p-type contact layer with a rough surface. Assisted by the nano pyramids surface roughening process, the light output power of the LEDs reached 11.3 and 9.7 mW with 10 and 5 min Mg-treatment at a driving current of 20 mA. The light outputs were increased by 48 and 27%, respectively, compared with the results from the LED without Mg-treatment.

• 2008-04-25

著者

• Kuo Hao-chung

  Department Of Photonic And Institute Of Electro-optical Engineering National Chiao Tung University

• Lu Tien-chang

  Department Of Photonics And Institute Of Electro-optical Engineering National Chiao Tung University

• Lee Chia-en

  Department Of Electrical Engineering National Chung Hsing University

• HUANG Hung-Wen

  Department of Photonics & Institute of Electro-Optical Engineering, National Chiao Tung University

• Wang Shing

  Department Of Mechanical And Mechatronic Eng. National Taiwan Ocean University

• Wang Shing

  Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Kuo Hao-Chung

  Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Chiu Ching-Hua

  Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Lo Ming-Hua

  Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Lu Tien-Chang

  Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

• Lee Chia-En

  Department of Photonics and Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan, R.O.C.

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