Characterizing Optical Constants of Thin Films for Vacuum Ultraviolet Lithography Applications
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-06-30
著者
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Chen Hsuen-li
Department Of Materials Science And Engineering National Taiwan University
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CHANG-LIAO Kuei-Shu
Department of Engineering and System Science, National Tsing Hua University
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Wu Chi-lung
Institute Of Engineering And System Science National Tsing Hua University
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FAN Wonder
National Nano Device Lab.
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