Thermal Flow and Chemical Shrink Techniques for Sub-100 nm Contact Hole Fabrication in Electron Beam Lithography

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-06-30

著者

• Chen H‐l

  Department Of Materials Science And Engineering National Taiwan University

• Chen H‐c

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng H‐c

  National Tsing Hua Univ. Hsinchu Twn

• Cheng Huang‐chung

  Nano Electronics And Display Technology Lab. Department Of Electronics Engineering And Institute Of

• KO Fu-Hsiang

  National Nano Device Lab.

• CHU Tieh-Chi

  Department of Nuclear Science, National Tsing Hua University

• CHEN Hsuen-Li

  National Nano Device Laboratories

• CHEN Ben-Chang

  National Nano Device Laboratory

• Chu Tien-chi

  Yuanpei Institute Of Science And Technology

• Ko F‐h

  National Nano Device Lab.

• Chu Tieh-chi

  Department Of Nuclear Science National Tsing Hua University

• Chen Hsuen-li

  National Nano Device Lab.

• LI Lung-Sheng

  Department of Nuclear Science, National Tsing Hua University

• HSU Chien-Kui

  Department of Nuclear Science, National Tsing Hua University

• Hsu Chien-kui

  Department Of Nuclear Science National Tsing Hua University

• Li Lung-sheng

  Department Of Nuclear Science National Tsing Hua University

• Chen Ben-chang

  National University Of Kaohsiung

• Chu Tieh-Chi

  Department of Atomic Science, National Tsing Hua University, Hsinchu 300, Taiwan, R.O.C.

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