Mechanism and Modeling of Ring Pattern Formation for Electron Beam Exposure on Zwitterresist

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-06-30

著者

• Chen Jem-kun

  National Nano Device Laboratories

• KO Fu-Hsiang

  National Nano Device Lab.

• CHEN Hsuen-Li

  National Nano Device Laboratories

• CHANG Feng-Chin

  Department of Applied Chemistry, National Chiao Tung University

関連論文

• Microwave Heating for the Preparation of Nanometer Gold Particles
• Synthesis of Nanometer-Sized Poly (methyl methacrylate) Polymer Network by Gold Nanoparticle Template
• Mechanism and Modeling of Ring Pattern Formation for Electron Beam Exposure on Zwitterresist
• Electrical Detection of Protein Using Gold Nanoparticles and Nanogap Electrodes
• Room Temperature Operation of a Coulomb Blockade Sensor Fabricated by Self-Assembled Gold Nanoparticles using Deoxyribonucleic Acid Hybridization
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• Thermal Flow and Chemical Shrink Techniques for Sub-100 nm Contact Hole Fabrication in Electron Beam Lithography
• Reduction Substrate Alkaline Contamination by Utilizing Multi-Layer Bottom Antireflective Coating Structures in ArF Lithography
• Low Dielectric Constant Polymer Materials as Bottom Antirefiective Coating Layers for both KrF and ArF Lithography
• Separation and Study of the Optical Properties of Silver Nanocubes by Capillary Electrophoresis
• Porous Materials with Ultralow Optical Constants for Integrated Optical Device Applications
• Multilayer Bottom Antireflective Coatings for High Numerical Aperture and Modified Illumination Exposure Systems
• Enhanced Extreme Ultraviolet Lithography Mask Inspection Contrast Using Fabry-Perot Type Antireflective Coating
• Room Temperature Operation of a Coulomb Blockade Sensor Fabricated by Self-Assembled Gold Nanoparticles using Deoxyribonucleic Acid Hybridization
• Mechanism and Modeling of Ring Pattern Formation for Electron Beam Exposure on Zwitterresist
• Microwave Heating for the Preparation of Nanometer Gold Particles
• Synthesis of Nanometer-Sized Poly (methyl methacrylate) Polymer Network by Gold Nanoparticle Template

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