CHEN Ben-Chang | National Nano Device Laboratory
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概要
関連著者
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CHEN Ben-Chang
National Nano Device Laboratory
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Chen H‐l
Department Of Materials Science And Engineering National Taiwan University
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Cheng H‐c
National Tsing Hua Univ. Hsinchu Twn
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Cheng Huang‐chung
Nano Electronics And Display Technology Lab. Department Of Electronics Engineering And Institute Of
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Tsai Tsung-ming
Institute Of Electronics National Chiao Tung University
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KO Fu-Hsiang
National Nano Device Lab.
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SZE Simon-M.
National Nano Device Laboratories
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CHEN Hsuen-Li
National Nano Device Laboratories
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TSAI Ming-Shih
National Nano Device Laboratory
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YANG Ya-Liang
National Nano Device Laboratory
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Ko F‐h
National Nano Device Lab.
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Chen Hsuen-li
National Nano Device Lab.
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Chen Ben-chang
National University Of Kaohsiung
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Chen H‐c
Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University
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CHANG Ting-Chang
Department of Physics, National Sun Yat-Sen University
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CHU Tieh-Chi
Department of Nuclear Science, National Tsing Hua University
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Sze Simon
Department Of Electronics Engineering And Institute Of Electronics National Chiao-tung University:na
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CHANG Ting-Chang
National Nano Device Laboratories
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LIU Po-Tsun
National Nano Device Laboratory
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YEH Fon-Shan
Institute of Electrical Engineering, National Tsing Hua University
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TSENG Tseung-Yuen
Institute of Electronics, National Chiao Tung University
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Chu Tien-chi
Yuanpei Institute Of Science And Technology
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Chang T‐c
Department Of Physics National Sun Yat-sen University
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Liu Po-tsun
National Nano Device Lab.
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Chu Tieh-chi
Department Of Nuclear Science National Tsing Hua University
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LI Lung-Sheng
Department of Nuclear Science, National Tsing Hua University
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HSU Chien-Kui
Department of Nuclear Science, National Tsing Hua University
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SHIH Ming-Chang
National Nano Device Lab.
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HSIEH Ching-Feng
National Nano Device Lab.
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Hsu Chien-kui
Department Of Nuclear Science National Tsing Hua University
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Li Lung-sheng
Department Of Nuclear Science National Tsing Hua University
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Yeh Fon-shan
Institute Of Electrical Engineering National Tsing Hua University
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Chang Ting-chang
Department Of Physics National Sun Yat-sen University
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Tseng Tseung-yuen
Institute Of Electronics National Chiao Tung University
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Chu Tieh-Chi
Department of Atomic Science, National Tsing Hua University, Hsinchu 300, Taiwan, R.O.C.
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Sze Simon-M.
National Nano Device Laboratory, 1001-1 Ta-Hsueh Rd., Hsinchu 300, Taiwan, R.O.C.
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Tseng Tseung-Yuen
Institute of Electronics, National Chiao Tung University, 1001 Ta-Hsueh Rd., Hsinchu 300, Taiwan, R.O.C.
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Chen Ben-Chang
National Nano Device Laboratory, 1001-1 Ta-Hsueh Rd., Hsinchu 300, Taiwan, R.O.C.
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Liu Po-Tsun
National Nano Device Laboratory, 1001-1 Ta-Hsueh Rd., Hsinchu 300, Taiwan, R.O.C.
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Tsai Ming-Shih
National Nano Device Laboratory, 1001-1 Ta-Hsueh Rd., Hsinchu 300, Taiwan, R.O.C.
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Tsai Tsung-Ming
Institute of Electronics, National Chiao Tung University, 1001 Ta-Hsueh Rd., Hsinchu 300, Taiwan, R.O.C.
著作論文
- Elimination of Dielectric Degradation for Chemical-Mechanical Planarization of LOW-k Hydrogen Silisesquioxane
- Thermal Flow and Chemical Shrink Techniques for Sub-100 nm Contact Hole Fabrication in Electron Beam Lithography
- Reduction Substrate Alkaline Contamination by Utilizing Multi-Layer Bottom Antireflective Coating Structures in ArF Lithography
- Elimination of Dielectric Degradation for Chemical-Mechanical Planarization of Low-$k$ Hydrogen Silisesquioxane