Low Temperature Synthesis of Single Crystalline Silicon Nanowires Using Anodic Aluminum Oxide Template
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概要
- 論文の詳細を見る
Single crystalline slilicon nanowires (SiNWs) arrays were grown successfully on a silicon substrate by the chemical vapor deposition (CVD) process at a very low temperature of 400 °C. This was made possible by combined use of gold nanoparticles as catalyst and anodic aluminum oxide (AAO) as template. The AAO template was fabricated on the substrate with pre-deposited gold nanoparticles. Various analytical instruments were used to identify and discuss the growth mechanism and the structure of the SiNWs. The energy dispersive X-ray spectrometer (EDS) spectrum of a single SiNW shows existence of alumina in the gold metal tip. This clearly indicates participation of AAO in the metal tip to enhance the growth process. Further discussion on the measurement results for the crystalline structure of the SiNWs is presented.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-09-30
著者
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Dai Bau-tong
National Nano Device Lab.
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Kuo Cheng-Yung
National Cheng Kung University, Institute of Aeronautics and Astronautics, and Center for Micro/Nano Science and Technology, Tainan 701, Taiwan
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Liu Chien-Wei
National Nano Device Laboratories, Southern Region Center, Tainan 701, Taiwan
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Gau Chie
National Cheng Kung University, Institute of Aeronautics and Astronautics, and Center for Micro/Nano Science and Technology, Tainan 701, Taiwan
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Shiau Shiuan-Hua
National Cheng Kung University, Institute of Aeronautics and Astronautics, and Center for Micro/Nano Science and Technology, Tainan 701, Taiwan
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Wang Chuan-Po
National Cheng Kung University, Institute of Aeronautics and Astronautics, and Center for Micro/Nano Science and Technology, Tainan 701, Taiwan
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