Plasma Treatment and Dry Etch Characteristics of Organic Low-k Dielectrics

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-12-30

著者

• Dai Bau-tong

  National Nano Device Laboratories

• Dai Bau-tong

  National Nano Device Lab.

• Dai Bau-tong

  National Nano Device Laboratory

• WEI Ta-Chin

  Department of Chemical Engineering, Chung Yuan University

• LIU Chi-Hung

  Department of Chemical Engineering, Chung Yuan University

• SHIEH Jia-Ming

  National Nano Device Laboratory

• SUEN Shich-Chang

  National Nano Device Laboratory

• Liu C‐h

  Nan Jeon Inst. Of Technol. Yan‐hsui Twn

• Wei Ta-chin

  Department Of Chemical Engineering Chung Yuan University

• Shieh Jia-ming

  National Nano Device Laboratories

• Suen Shich-Chang

  National Nano Device Laboratories, Hsinchu 300, Taiwan, R.O.C.

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