A Decoupled Capacitance Measurement Technique for Characterization of Small-Geometry MOSFETs with Ultra-Thin Gate Oxides

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概要

• 論文の詳細を見る
• 2001-09-25

著者

• Liu C‐h

  Nan Jeon Inst. Of Technol. Yan‐hsui Twn

• Lee Ming

  United Microelectronics Corp.

• LIU Chuan-Hsi

  United Microelectronics Corp.

• CHEN Jenkon

  United Microelectronics Corp.

• CHENG Yao-Chin

  United Microelectronics Corp.

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• A Decoupled Capacitance Measurement Technique for Characterization of Small-Geometry MOSFETs with Ultra-Thin Gate Oxides

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