KANG Tzong-Kuei | Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

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概要

• 同名の論文著者
• Department of Electronics Engineering and Institute of Electronics, National Chiao Tung Universityの論文著者

関連著者

• Chen H‐c

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• CHENG Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Dai B‐t

  National Nano Device Lab. Hsinchu Twn

• Dai Bau-tong

  National Nano Device Laboratories

• Dai Bau-tong

  National Nano Device Lab.

• KANG Tzong-Kuei

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Kang Tzong-kuei

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Cheng Huang-chung

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tang University

• Cheng H‐c

  National Tsing Hua Univ. Hsinchu Twn

• Cheng Huang‐chung

  Nano Electronics And Display Technology Lab. Department Of Electronics Engineering And Institute Of

• LIN Wendy

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• PERNG Yean-Chyi

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• UENG Shih-Yuan

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• CHEN Liang-Po

  National Nano Device Laboratory

• Chen L‐p

  National Nano Device Laboratories

• Lin Wu

  Precision Engineering And Nanotechnology Center School Of Mechanical & Production Engineering Na

• Chen Liang-po

  National Nano Device Laboratories

• Ueng Shih-yuan

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Perng Yean-chyi

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Dai Bau-tong

  National Nano Device Laboratory

• CHEN Huang-Chung

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• Lin W

  Chartered Semiconductor Manufacturing Ltd. Sgp

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著作論文

• Effects of Helicon-Wave-Plasma Etching on the Charging Damage of Aluminum Interconnects
• Charging Damages to Gate Oxides in a Helicon O_2 Plasma
• Antenna Charging Effects on the Electrical Characteristics of Polysilicon Gate during Electron Cyclotron Resonance Etching
• Effects of Polysilicon Electron Cyclotron Resonance Etching on Electrical Characteristics of Gate Oxides

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