Low-Temperature Epitaxial Growth of Silicon and Silicon-Germanium Alloy by Ultrahigh-Vacuum Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-01-15

著者

• Chang C‐y

  Department Of Electronics Engineering National Chiao Tung University

• Huang Guo-wei

  National Nano Device Laboratories

• Wang T

  National Chiao Tung Univ. Hsin‐chu Twn

• Chang Chun-yen

  Institute Of Electronics National Chiao Tung University

• Chang Chun-yen

  Instiute Of Electronics National Chiao-tang University

• Chang Chun-yen

  Department Of The Electro-optical Engineering National Chiao Tung University

• LIN Horng-Chih

  Institute of Electronics, National Chiao Tung University

• Lin H‐c

  National Nano Device Laboratories

• Lin Horng-chih

  Institute Of Electronics National Chiao Tung University

• HUANG Guo-Wei

  Institute of Electronics, National Chiao Tung University

• TSAI Wen-Chung

  Department of Electronic Engineering and Institute of Electronics, National Chiao-Tung University

• TSAI Wen-Chung

  Institute of Electronics, National Chiao Tung University

• JUNG Tz-Guei

  Institute of Electronics, National Chiao Tung University

• WANG Pei-Jih

  National Nano Device Laboratory

• Chang Chun-yen

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• CHANC Ting-Chang

  Institute of Electronics, National Chiao Tung University

• WANG Tom

  Institute of Electronics, National Chiao Tung University

• JUNG Tz-Guei

  Department of Electronic Engineering and Institute of Electronics, National Chiao-Tung University

• Tsai Wen-chung

  Department Of Electronic Engineering And Institute Of Electronics National Chiao-tung University

• Chang T‐c

  Department Of Physics National Sun Yat-sen University

• Huang G‐w

  National Nano Device Laboratories

• Jung Tz-guei

  Department Of Electronic Engineering And Institute Of Electronics National Chiao-tung University

• Chang Chun-yen

  Institute Of Electronics National Chiao Tang University:national Nano-device Laboratories

• Chang T‐c

  National Nano Device Laboratories:department Of Physics National Sun Yat-sen University

• Chang C‐y

  Department Of Electronics Engineering Nation Chiao Tung University

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