Implementation of Surface Acoustic Wave Vapor Sensor Using Complementary Metal–Oxide–Semiconductor Amplifiers

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概要

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• A surface acoustic wave (SAW) vapor sensor is presented in this work. A SAW delay line oscillator on quartz substrate with the high gain complementary metal–oxide–semiconductor (CMOS) amplifier using a two-poly–two-metal (2P2M) 0.35 μm process was designed. The gain of the CMOS amplifier and its total power consumption are 20 dB and 70 mW, respectively. The achieved phase noise of this SAW oscillator is $-150$ dBc/Hz at 100 kHz offset. The sensing is successfully demonstrated by a thin poly(epichlorohydrin) (PECH) polymer film on a SAW oscillator with alcohol vapor. This two-in-one sensor unit includes the SAW device and the CMOS amplifier provides designers with comprehensive model for using these components for sensor circuit fabrication. Furthermore it will be promising for future chemical and biological sensing applications.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2009-04-25

著者

• Huang Guo-wei

  National Nano Device Laboratories

• CHIU Chia-Sung

  National Nano Device Laboratories

• Ku Chia-Lin

  Chung Yuan Christian University, Department of Electronic Engineering, 200, Chung Pei Rd., Chungli, Taiwan 32023, R.O.C.

• Chang Ching-Chun

  Chung Yuan Christian University, Department of Electronic Engineering, 200, Chung Pei Rd., Chungli, Taiwan 32023, R.O.C.

• Peng Kang-Ming

  Chung Yuan Christian University, Department of Electronic Engineering, 200, Chung Pei Rd., Chungli, Taiwan 32023, R.O.C.

• Jeng Erik

  Chung Yuan Christian University, Department of Electronic Engineering, 200, Chung Pei Rd., Chungli, Taiwan 32023, R.O.C.

• Chen Wen-Lin

  National Nano Device Laboratories, No. 26, Prosperity Rd. I, Science-based Industrial Park, Hsinchu, Taiwan 30078, R.O.C.

• Wu Lin-Kun

  National Chiao Tung University, Department of Communication Engineering, 1001 University Road, Hsinchu, Taiwan 300, R.O.C.

• Huang Guo-Wei

  National Nano Device Laboratories, No. 26, Prosperity Rd. I, Science-based Industrial Park, Hsinchu, Taiwan 30078, R.O.C.

• Chiu Chia-Sung

  National Nano Device Laboratories, No. 26, Prosperity Rd. I, Science-based Industrial Park, Hsinchu, Taiwan 30078, R.O.C.

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