Shallow-Trench Isolation With Raised-Field-Oxide Structure

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-03-15

著者

• Chang Chun

  Department Of Electronics Engineering National Chiao Tung University

• Chang C‐y

  Department Of Electronics Engineering National Chiao Tung University

• CHANG Chun-Yen

  Department of Electronics Engineering, National Chiao Tung University

• Chang Chun-yen

  Instiute Of Electronics National Chiao-tang University

• Chang Chun-yen

  Department Of The Electro-optical Engineering National Chiao Tung University

• Chen Coming

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• Chang Chun-yen

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung Uiversity

• Chou J‐w

  United Microelectronics Corp. Technology Development Division

• Chou Jih-wen

  United Microelectronics Corporation Device Engineering Department Specially Technology Division

• Sun S‐w

  United Microelectronics Corp. Science-based Industrial Park

• LUR Water

  United Microelectronics Corp., Science-Based Industrial park

• SUN Shih-Wei

  United Microelectronics Corp., Science-Based Industrial park

• Lur Water

  United Microelectronics Corp. Science-based Industrial Park

• Chang C‐y

  Department Of Electronics Engineering Nation Chiao Tung University

• Chou Jih-Wen

  United Microelectronics Corp.

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