Epitaxial Growth of the GaN Film by Remote-Plasma Metalorganic Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-10-15

著者

• Sze S‐m

  National Nano Device Lab. Hsinchu Twn

• Chang Chun

  Department Of Electronics Engineering National Chiao Tung University

• Chang C‐y

  Department Of Electronics Engineering National Chiao Tung University

• CHANG Chun-Yen

  Department of Electronics Engineering, National Chiao Tung University

• TSANG Jian-Shihn

  National Nano Device Laboratories

• CHAN Shih-Hsiung

  National Nano Device Laboratories

• CHANG Chun-Yen

  National Nano Device Laboratories

• Chan S‐h

  Advanced Epitaxy Technol. Inc. Hsinchu Twn

• Lai W‐c

  National Cheng Kung Univ.

• Chang Chun-yen

  Instiute Of Electronics National Chiao-tang University

• Chang Chun-yen

  Department Of The Electro-optical Engineering National Chiao Tung University

• Chan Shih-hsiung

  Department Of Electrical Engineering National Cheng Kung University

• SZE Simon

  National Nano Device Laboratory

• Sze S

  National Chiao‐tung Univ. Hsinchu Twn

• Sze Simon

  Department Of Electronics Engineering And Institute Of Electronics National Chiao-tung University:na

• Sze Simon-m.

  National Nano Device Laboratory

• Sze Simon

  National Nano Device Laboratories

• Guo J‐d

  National Nano Device Laboratory

• Wei S‐c

  Key Laboratory Of Semiconductor Lasers Changchun University Of Science And Technology

• TSANG Jian-Shihn

  Advanced Epitaxy Technology Inc.

• LAI Wei-Chi

  National Cheng Kong University, Department of Electrical Engineering

• YOKOYAMA Meiso

  National Cheng Kong University, Department of Electrical Engineering

• GUO Jen-Dar

  National Nano Device Laboratories

• Bow Jong-Shing

  Industrial Technology Research Institute, Materials Research Laboratories

• WEI Sun-Chin

  Da-Yeh Institute of Technology, Graduate School of Electrical Engineering

• HONG Ray-Hua

  Da-Yeh Institute of Technology, Graduate School of Electrical Engineering

• Hong Ray-hua

  Da-yeh Institute Of Technology Graduate School Of Electrical Engineering

• Yokoyama M

  Kawasaki Heavy Ind. Ltd. Chiba Jpn

• Bow J‐s

  Materials Res. Lab. Industrial Technol. Res. Inst. Twn

• Tsang J‐s

  Advanced Epitaxy Technol. Inc. Hsinchu Twn

• Chang C‐y

  Department Of Electronics Engineering Nation Chiao Tung University

• Chang Chun-Yen

  National Chiao Tung University, Hsinchu, Taiwan, 30050, Republic Of China

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