Effects of [H_2S]/[DMZn] Molar Ratio on ZnS Films Grown by Low-Pressure Metalorganic Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-02-15

著者

• Su Y

  National Cheng Kung Univ. Tainan Twn

• Yokoyama Meiso

  Department of Electrical Engineering, National Cheng Kung University

• Li J

  National Cheng Kung Univ. Tainan Twn

• Su Yan

  Institute Of Microelectronics Department Of Electrical Engineering National Cheng-kung University

• Su Yan

  Department Of Electrical Engineering National Cheng Kung University

• Li Jiin

  Department Of Electrical Engineering National Cheng Kung University

• Yokoyama M

  Kawasaki Heavy Ind. Ltd. Chiba Jpn

• Yokoyama Meiso

  Department Of Electrical Engineering National Cheng Kung University

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