Reactive Ion Etching of ZnSe, ZnSSe, ZnCdSe and ZnMgSSe by H_2/Ar and CH_4/H_2/Ar
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-06-15
著者
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Su Y
National Cheng Kung Univ. Tainan Twn
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CHEN W.
Department of Photonics & Institute of Electro-Optical Engineering, National Chiao Tung University
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Chen W
Institute Of Microelectronics Department Of Electrical Engineering And Advanced Optoelectronic Techn
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CHANG S.
Department of Electrical Engineering, National Cheng Kung University
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SU Y.
Department of Electrical Engineering, National Cheng Kung University
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LAN W.
Chung Shan Institute of Science and Technology
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LIN A.
Chung Shan Institute of Science and Technology
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CHANG H.
Chung Shan Institute of Science and Technology
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Chen W.
Department Of Civil Engineering Lehigh University
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Su Y.
Department Of Electrical Engineering National Cheng Kung University
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Su Y.k.
Department Of Electrical Engineering National Cheng Kung University
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Chen W.R.
Department of Electrical Engineering, National Cheng Kung University
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Chang S.J.
Department of Electrical Engineering, National Cheng Kung University
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