SiO_2/InP Structure Prepared by Direct Photo-Chemical Vapor Deposition Using Deuterium Lamp and Its Applications to Metal-Oxide-Semiconductor Field-Effect Transistor

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-02-15

著者

• Su Y‐k

  National Cheng Kung Univ. Tainan Twn

• Su Yan-kuin

  Department Of Electrical Engineering National Cheng-kung University

• Yokoyama Meiso

  Department of Electrical Engineering, National Cheng Kung University

• Su Yan-kuin

  Department Of Electrical Engineering And Institute Of Microelectronics National Cheng Kung Universit

• Shei S‐c

  Department Of Electrical Engineering National Cheng Kung University

• Shei Shih-Chang

  Department of Electrical Engineering, National Cheng Kung University

• Hwang Chih-Jen

  Department of Electrical Engineering, National Cheng Kung University

• Yokoyama Meiso

  Department Of Electrical Engineering National Cheng Kung University

• Hwang Chih-jen

  Department Of Electrical Engineering National Cheng Kung University

• Shei Shih-chang

  Department Of Electrical Engineering National Cheng Kung University

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