Atomic Layer Epitaxy of ZnS by Low-Pressure Horizontal Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-05-15
著者
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Su Yan
Department Of Electrical Engineering National Cheng Kung University
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Yokoyama Meiso
Department Of Electrical Engineering National Cheng Kung University
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Liu Chun.
Department Of Electrical Engineering National Cheng Kung University
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Su Yan.
Department Of Electrical Engineering National Cheng Kung University
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LEE Nien.
Department of Electrical Engineering, National Cheng Kung University
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Lee Nien.
Department Of Electrical Engineering National Cheng Kung University
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LIU Chun
Department of Electrical Engineering, National Cheng Kung University
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